TCAD (technology computer aided design) tools have become an indispensable utensil for the semiconductor industry. The possibilities to analyze, predict and optimize a certain semiconductor device behavior through modeling semiconductor fabrication (Process TCAD) and semiconductor device operation (Device TCAD) are countless. This includes the area for ESD and Latch-up development, as early access to fundamental device parameters under very high current density and high temperature transients is the key to overcome the conceptual problem of concurrent engineering for ESD engineers.